He tino rongonui te whatu whatu taiaho i roto i te PCB angiangi ngohengohe me te tina. Ko te tono o te taiaho mo te roopu o Ag etching, ka patai ki te whakakotahitanga o te hapa o te rahi o te kurupae me te waahi whai waahi waiariki. Ko te Ftheta he hoahoa matatini me te paninga.
Kei te tuku a Carmanhaas i nga tohungatanga laser etching optics. Ko nga waahanga whatu te nuinga e korero ana ki nga waahanga whatu e whakamahia ana i roto i te tarai poari ara iahiko. Ko enei punaha whatu he punaha matawai galvanometer, tae atu ki nga whakawhanui kurupae, galvanometers me te arotahi matawai F-THETA.
(1) Te tika o te mata o te Arotahi < λ/5, ko te kaupapa huihuinga o te arotahi whainga e hiahiatia ana kia rite tonu te teitei o te waahi;
(2) Whakahōputu-katoa te riterite wahi arotahi>95%;
(3) Te riterite o te rererangi arotahi <0.5mm;
(4) Whakahōputu ōwehenga roa arotahi >1.05.
1064nm F-Theta Arotahi
| Whakaahuatanga Wahi | Roa Arotahi (mm) | Matawai Mara (mm) | Te tomokanga Max Ākonga (mm) | Tawhiti Mahi(mm) | Whakaeke Miro |
| SL-1064-140-200 | 200 | 140x140 | 14 | 208 | M85x1 |
| SL-1064-185-255-(16CA) | 255 | 185x185 | 16 | 274 | M85x1 |
1064nm Whakarahi Kurupae
| Whakaahuatanga Wahi | Whakawhanui ōwehenga | Whakauru CA (mm) | Huaputa CA (mm) | Te Taera Whare (mm) | Whare Roa (mm) | Whakaeke Miro |
| BE-1064-D23:40.5-1.5x | 1.5X | 10 | 20.7 | 27 | 40.5 | M22*0.75 |
| BE4-(1030-1090)-D35:163.9-Z14x | 1X-4X | 20 | 35 | 44 | 163.9 | / |
| BE4-(1030-1090)-D34:162.6-Z210x | 2X-10X | 14 | 34 | 40 | 162.6 | / |
1064nm Whakaata
| Diamita (mm) | Mātotoru (mm) | Te paninga |
| 25.4 | 6.35 | HR@1030-1090nm, 45° AOI |
| 30 | 5 | HR@1030-1090nm, 45° AOI |
| 50 | 10 | HR@1030-1090nm, 45° AOI |
